Time-resolved evolution of plasma parameters in a plasma immersion ion implantation source
Bibliographic record
Abstract
The origin and nature of perturbations induced by a high-voltage pulse on plasma parameters and their relationship to operating conditions (power and pressure) in an argon inductively coupled radio frequency plasma device is explored. The plasma parameters are measured with two radio frequency compensated Langmuir probes positioned either vertically above the pulsing target or horizontally along the diameter of the chamber, in the same axial plane as the target and same distance from the RF antenna. Fluctuations are observed in electron density ne, temperature Te, and plasma potential Vpl following negative polarity high voltage pulses and propagate deep in the plasma and well after the end of the pulse. Time-resolved data results indicate that the perturbations are significantly dampened at higher power as well as when closer to the plasma RF coil. The perturbation amplitudes depart significantly from steady state values when the pulse amplitude exceeds 2.0 kV and increase with the increasing pulse amplitude. Perturbation amplitudes are also higher for target materials having larger secondary electron yield. Our experimental results suggest that the underlying mechanism of this perturbation could be plasma heating driven by damping of a beam-plasma instability as a result of a beam of secondary electrons emitted by the target streaming into the plasma.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".