Bibliographic record
Abstract
The arrival of the femtosecond laser with a MHz repetition rate has provided the industry with a new tool to conduct submicron and nano scale machining. Several advantages such as high quality machining finish, good precision and high throughput can be obtained when using femtosecond laser to conduct nanomachining over lithography techniques currently in use. High repetition rate systems are preferred over low repetition rate femtosecond laser systems that have been studied by others due to their increased stability, speed, quality and discovery of new phenomena such as ripples and grains. This thesis proposes a high repetition rate fiber femtosecond laser system for meeting the above-mentioned conditions. The influence of the laser repetition rate and pulse energy on the size and quality of nano features fabricated on silicon wafers was investigated. Higher repetition rates led to smaller cutlines with uniform width. A 110 nm crater with a small heat affected zone of 0.79 µm was obtained at 13 MHz repetition rate and 2.042 J/cm² energy fluence. In terms of nanomachining below the ablation threshold (surface patterning), the influence of pulse width, repetition rate and pulse energy on the spacing of ripples, as well as diameter of grains created on silicon wafers, was examined. For the pulse width, repetition rate and pulse energy range used, the ripple spacing and grain diameter increased with laser pulse duration while other parameters did not play a significant role. These results show the capability of the proposed system in meeting the industry requirements.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.001 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".