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Record W4280577806 · doi:10.1116/6.0001761

Tunable emission from Eu:SiOxNy thin films prepared by integrated magnetron sputtering and plasma enhanced chemical vapor deposition

2022· article· en· W4280577806 on OpenAlexafffund
Fahmida Azmi, Yuxuan Gao, Zahra Khatami, Peter Mascher

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2022
Typearticle
Languageen
FieldMaterials Science
TopicLuminescence Properties of Advanced Materials
Canadian institutionsUniversity of New BrunswickMcMaster University
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsMaterials scienceEuropiumSputter depositionAnalytical Chemistry (journal)PhotoluminescenceElastic recoil detectionAmorphous solidRutherford backscattering spectrometrySilicon oxynitrideSputteringThin filmDopantChemical vapor depositionPlasma-enhanced chemical vapor depositionSiliconLuminescenceDopingOptoelectronicsChemistryNanotechnologySilicon nitrideCrystallography

Abstract

fetched live from OpenAlex

This paper reports tunable emission of trivalent (Eu3+) and divalent (Eu2+) europium (Eu) from SiOxNy films fabricated by integrated electron cyclotron plasma enhanced chemical vapor deposition and magnetron sputtering. The photoluminescence (PL) spectra of intense red emission from Eu3+ around 600 nm and blue (cyan) broadband emission from 400 to 750 nm of Eu2+ are observed under daylight conditions with the naked eye. The spectra reveal a strong dependency of the PL on the atomic concentration of the dopant and the silicon/nitrogen ratio. The atomic composition of the films is investigated by Rutherford backscattering spectrometry and elastic recoil detection analysis. Values of the refractive indices are obtained by variable angle spectroscopic ellipsometry. To confirm the presence of crystalline phases of europium silicate Eu4.67(SiO4)3O [Eu2(Si2O7)] and europium silicon oxynitride (EuSi2N2O2) distributed in the amorphous host matrix of SiOxNy, high-resolution x-ray diffraction is used. The findings of this work are promising toward the realization of europium-doped Si-based materials for photonics and lighting technologies.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.002

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.218
Teacher spread0.212 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations6
Published2022
Admission routes2
Has abstractyes

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