Feasibility of two-dimensional die-level plasma process monitoring using spatially resolvable optical emission spectrometers
Bibliographic record
Abstract
We demonstrated the feasibility of die-level process monitoring using spatially resolvable optical emission spectrometers (SROESs) in a low-pressure plasma reactor. The spatially resolved Ar emission line intensities and their intensity ratios were obtained from uniformly generated and intentionally perturbed plasma by inserting conductors of known sizes at known locations. The sheath and perturbed plasma distributions were identified from the Ar emission line intensity and their intensity ratio in the lateral direction to the SROES installment orientation. However, the resolution in the axial direction was insufficient to identify the sheath and perturbed the plasma distribution. We propose the superimposition of measured plasma emission intensities from two perpendicularly aligned SROESs for die-level process monitoring. The insufficient axial resolution can be compensated for by the lateral resolution of another SROES, and die-level process monitoring using SROES can thus be realized.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".