Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches
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Bibliographic record
Abstract
Packaging radio-frequency microelectromechanical systems (RF-MEMS) is mandatory for their integration in electronic systems. This paper discusses the integration of a Au−Ru/AlCu contact in a MEMS fabrication process with a wafer-level packaging (WLP) step through Al−Ge eutectic bonding. The Au contact is embedded in a movable fixed−fixed beam made of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$30 ~ \mu \text{m}$ </tex-math></inline-formula> thick Si while Ru is used as a coating metal on top of the AlCu static electrode. The measured return loss and isolation of the contact, up to 40 GHz, are <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\geq -1.7$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\leq -12$ </tex-math></inline-formula> dB respectively. The WLP Au−Ru/AlCu contact has an electrical resistance <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\leq 1.2 ~ \Omega $ </tex-math></inline-formula> up to 3 million cycles in hot switching at 0.1 W before failing due to high electrical resistance. Au hillocking is identified as the only intrinsic limiting mechanism that can be mitigated by an appropriate design rule. It is demonstrated that Au−Ru/AlCu is a promising contact configuration, compatible with Al−Ge eutectic bonding, and can be integrated in a standard MEMS fabrication process flow for the development of a robust generation of WLP RF-MEMS.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it