Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches
Bibliographic record
Abstract
Packaging radio-frequency microelectromechanical systems (RF-MEMS) is mandatory for their integration in electronic systems. This paper discusses the integration of a Au−Ru/AlCu contact in a MEMS fabrication process with a wafer-level packaging (WLP) step through Al−Ge eutectic bonding. The Au contact is embedded in a movable fixed−fixed beam made of$30 ~ \mu \text{m}$thick Si while Ru is used as a coating metal on top of the AlCu static electrode. The measured return loss and isolation of the contact, up to 40 GHz, are$\geq -1.7$and$\leq -12$dB respectively. The WLP Au−Ru/AlCu contact has an electrical resistance$\leq 1.2 ~ \Omega $up to 3 million cycles in hot switching at 0.1 W before failing due to high electrical resistance. Au hillocking is identified as the only intrinsic limiting mechanism that can be mitigated by an appropriate design rule. It is demonstrated that Au−Ru/AlCu is a promising contact configuration, compatible with Al−Ge eutectic bonding, and can be integrated in a standard MEMS fabrication process flow for the development of a robust generation of WLP RF-MEMS.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".