Electron beam lithography on non-planar, suspended, 3D AFM cantilever for nanoscale thermal probing
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
Abstract Electron beam lithography (EBL) on non-planar, suspended, curved or bent surfaces is still one of the most frequently stated problems for fabricating novel and innovative nano-devices and sensors for future technologies. Although spin coating is the most widespread technique for electron resist (e-resist) deposition on 2D or flat surfaces, it is inadequate for suspended and 3D architectures because of its lack of uniformity. In this work, we use a thermally evaporated electron sensitive resist the QSR-5 and study its sensitivity and contrast behaviour using EBL. We show the feasibility of utilizing the resist for patterning objects on non-planar, suspended structures via EBL and dry etching processes. We demonstrate the integration of metal or any kind of thin films at the apex of an atomic force microscopy (AFM) tip. This is showing the great potential of this technology in various fields, such as magnetism, electronic, photonics, phononics and other fields related to near field microscopy using AFM probe like for instance scanning thermal microscopy.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it