Process Development of Amorphous Indium Tin Gallium Oxide (ITGO) Thin Film Transistors
Bibliographic record
Abstract
The focus of this study is an investigation on Indium-Tin-Gallium-Oxide (ITGO) TFTs. Unpassivated bottom-gate devices werefabricated with a sputter-deposited 30nm a-ITGO film with 1% and10% oxygen gas ambient, followed by a 1 or 2 hour anneal at 300oCin oxygen. Devices fabricated with PO2 = 1% resulted in a highlyconductive channel, whereas devices with PO2 = 10% displayedsemiconducting behavior and a shallow subthreshold. Followingaging in room ambient for multiple days, devices displayed left-shifted transfer characteristics with steep subthreshold. It ishypothesized that the unpassivated back-channel attains a morehomogeneous trap distribution. The ITGO devices demonstrate aneffective channel mobility approximately 2.5 times higher thanIGZO TFTs. Radial variation in device performance can beattributed to non-uniformities in the as-deposited ITGO film, with acorrelation to the distribution in optical constants across the wafer.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".