Plasma-Enhanced Molecular Layer Deposition of Phosphane-ene Polymer Films
Bibliographic record
Abstract
A vapour phase molecular layer deposition (MLD) process generating phosphorus-rich phosphane-ene polymer networks was adapted from known solution phase methods and successfully used in a commercial atomic layer deposition tool. By using plasma-enhanced MLD on Si/SiO2 and Al2O3 substrates, film deposition was carried out with a commercially available primary phosphine, iBuPH2, paired with a known volatile cyclic siloxane precursor, tetramethyltetravinylcyclotetrasiloxane (D4Vinyl). The deposition process used radicals generated by an Ar plasma source to facilitate P-H addition to vinyl functionalities on D4Vinyl which yielded a growth per cycle of 0.6 – 2.0 Å, generating 10-120 nm films as determined by AFM and SEM measurements. Characterization of the films were carried out using X-ray photoelectron spectroscopy and oxygen scavenging capabilities were studied using a quartz crystal microbalance, showing an uptake of oxygen by a 12 nm depth of a freshly deposited polymer film.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".