Study on the damage evolution of 6H-SiC under different phosphorus ion implantation conditions and annealing temperatures
Bibliographic record
Abstract
In this work, we investigate the radiation damage of 6H-SiC crystals by phosphorus (P) ion implantation. The 6H-SiC samples were implanted at different energy with the same fluence of 5.0 × 10 14 ions/cm 2 at room temperature, one of which was subsequently annealed. Raman and absorption spectra were obtained to probe the structure and optical properties of 6H-SiC crystals after P ion implantation. In addition, Rutherford backscattering/channeling spectroscopy and transmission electron microscopy were used to explore further the damage behavior at different implantation energy and damage evolution with post-annealing treatment. It was found that the damage of the 200 keV implanted sample partially recovered after annealing at 600 °C for 60 min and disappeared at an annealing temperature of 800 °C. The damage evolution behavior of phosphorus ions implantation into 6H-SiC crystals with different implantation and annealing conditions is presented in our work.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".