Study on the damage evolution of 6H-SiC under different phosphorus ion implantation conditions and annealing temperatures
Why this work is in the frame
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Bibliographic record
Abstract
In this work, we investigate the radiation damage of 6H-SiC crystals by phosphorus (P) ion implantation. The 6H-SiC samples were implanted at different energy with the same fluence of 5.0 × 10 14 ions/cm 2 at room temperature, one of which was subsequently annealed. Raman and absorption spectra were obtained to probe the structure and optical properties of 6H-SiC crystals after P ion implantation. In addition, Rutherford backscattering/channeling spectroscopy and transmission electron microscopy were used to explore further the damage behavior at different implantation energy and damage evolution with post-annealing treatment. It was found that the damage of the 200 keV implanted sample partially recovered after annealing at 600 °C for 60 min and disappeared at an annealing temperature of 800 °C. The damage evolution behavior of phosphorus ions implantation into 6H-SiC crystals with different implantation and annealing conditions is presented in our work.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it