Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices
Bibliographic record
Abstract
Indium Phosphide (InP) is one of the most widely commercialized III–V semiconductor materials for making efficient lasers operating in the O-band and C-band. It is also gaining significant attention as a material platform for passive integrated optical devices operating in the telecommunication wavelength range for optical communication networks and sensing. Fabrication of such devices requires a process of lithography for pattern writing followed by plasma etching for transferring the pattern into the semiconductor material. InP is one of the most difficult materials to etch due to the fact that the etching by-products (InClx) are not volatile at temperatures less than 150 °C. There have been some studies showing InP etching at lower temperatures and room temperatures. However, after carefully studying these processes using multiple plasma etching tools, we found that the claimed processes are not repeatable because of the low volatility of the by-products at room temperature. In this work, we demonstrate a systematic study of etching InP using methane-hydrogen-based chemistry at low temperatures (60 °C) and chlorine-based chemistry at high temperatures (190 °C).
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.002 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".