Controlling the optical properties of hafnium dioxide thin films deposited with electron cyclotron resonance ion beam deposition
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Bibliographic record
Abstract
The effects of reactive and sputtering oxygen partial pressure on the structure, stoichiometry and optical properties of hafnium oxide (HfO2) thin films have been systematically investigated. The electron cyclotron resonance ion beam deposition (ECR-IBD) technique was used to fabricate the films on to JGS-3 fused silica substrates. The amorphous structure of HfO2 films were determined by X-ray Diffraction. Energy-dispersive X-ray Spectroscopy and Rutherford Backscattering Spectrometry were carried out for the composition and stoichiometry analysis, where this suggests the formation of over-stoichiometric films. The data suggests that the O:Hf ratio ranges from 2.4 – 4.45 to 1 for the ECR-IBD fabricated HfO2 films in this study. The transmission and reflectance spectra of the HfO2 films were measured over a wide range of wavelengths (λ = 185 – 3000 nm) by utilizing a spectrophotometer. The measured spectra were analyzed by an optical fitting software, which utilizes the model modified by O'Leary, Johnson and Lim, to extract the optical properties, refractive index (n) and the bandgap energy (E0). By varying the reactive and sputtering oxygen partial pressure, the optical properties were found to be n = 1.70 – 1.91, and E0 = 5.6 – 6.0 eV. This study provides a flexible method for tuning the optical properties of HfO2 coatings by controlling the mixture of reactive and sputtering gas.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it