Pulsed-aerosol assisted low-pressure plasma for thin film deposition
Bibliographic record
Abstract
Abstract Plasma-enhanced chemical vapor deposition (PE-CVD) is intensively studied and developed to form (multi-)functional thin films. Generally produced in gases or vapors of thermodynamically stable and chemically inert precursors, aerosol assisted plasma process becomes an alternative as it enables to inject various liquid solutions independently of these characteristics. This study examines the case of pentane aerosols injected in pulsed mode in a low-pressure RF plasma. It produces diamond-like carbon thin films with material balance larger than those obtained in gaseous processes. Here, the deposition process is controlled by the pulsed injection. Indeed, the dynamics of thin film deposition result in time-dependent mechanisms at the pulse scale related to the temporary increase of the working pressure and the presence of liquid droplets in the plasma volume. Hence, thin film deposition is controlled by plasma-surface as well as plasma-droplets interactions. Consequently, aerosol-assisted plasma processes are really relevant for the deposition of (multi-)functional coatings.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".