Robust Fulcrum-Type Wafer-Level Packaged MEMS Switches Utilizing Al-Ru/AlCu Contacts Fabricated in a Commercial MEMS Foundry
Bibliographic record
Abstract
This paper reports robust wafer level packaged radio-frequency (RF) microelectromechanical systems (MEMS) switches fabricated in a commercial high volume MEMS foundry. A novel wafer level packaging method is developed to improve the mechanical robustness of the movable shuttle. Two SPST switches are packaged in a single die utilizing a shared seesaw-type membrane that pivots on a fulcrum. Single metal contact (S1) and triple metal contact (S2) switch tips provides low-loss and high isolation respectively. The proposed seesaw-type switch offers a unique solution to improve MEMS reliability with the use of non-metallic thick membrane that minimizes stiction, cantilever sagging/curling, contact degradation and micro-welding problems commonly found in MEMS switches. The packaging method does not degrade the RF performance and operates at 30 V. Packaged S1 MEMS switch shows less than 0.6 dB of insertion loss and better than 20 dB of isolation while S2 switch demonstrates lower than 1 dB of insertion loss and higher than 45 dB of isolation from dc to 20 GHz.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".