Silicon-Micromachined Liquid Crystal Variable Capacitors for Tunable RF Devices
Bibliographic record
Abstract
This paper presents the design and fabrication of a silicon-micromachined variable capacitor based on nematic liquid crystal (LC). The LC material is encapsulated in a thin micromachined housing, and its dielectric properties are controlled electronically. The chip capacitor can be used in a wide range of RF reconfigurable applications that require analog tuning. Measurement and simulation results are presented for the chip LC variable capacitor. It exhibits a measured quality factor ranging from 44-123 at 1 GHz. Biasing voltage ranging from 0 V to 40 V results in a measured capacitance change of 18% for the fabricated micromachined capacitor. The devices are fabricated using an in-house multi-layer microfabrication process. An ion beam irradiation system is employed for the treatment of the pre-alignment layer. To our knowledge, this is the first time a chip LC-based variable capacitor has been demonstrated.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".