Sputtering of Ultra-thin Cu Nano-twinned Films on Si Wafers for Application in Advanced 3D-IC Packaging
Bibliographic record
Abstract
The nanotwinned structure has been attracting a great deal of attention due to its excellent mechanical and electrical properties.In this study, ultra-thin nanotwinned Cu (nt-Cu) films with a thickness of 1.5 um were fabricated by DC magnetron sputtering with moderate substrate bias.Within these films, an equiaxed-grain transition layer only 100-400 nm thick was formed between the nanotwinned region and Si substrate and observed by focused ion beam (FIB).The XRD and EBSD analyses indicated that the as-deposited nanotwinned films had a strong (111) preferred orientation.The surface roughness of the films, as measured with an atomic force microscope (AFM), was below 10 nm, which was sufficiently smooth for chip bonding at low temperature with minor pressure.Direct bonding of Si chips sputtered with such ultra-thin nt-Cu films with (111) preferred orientation has been evidenced to yield a sound interface, and this bonding method can be applied for the manufacturing of 3D-IC packages.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".