Optical and Structural Properties of Europium-Doped Silicon Oxide Fabricated Using Integrated Sputtering and Chemical Vapour Deposition
Bibliographic record
Abstract
Europium (Eu) doped silicon oxide (SiOx) thin films containing Eu concentrations of 0.2 to 6.4 at% were fabricated using a hybrid deposition system combining a magnetron sputtering gun serving as the doping source with electron cyclotron resonance plasma enhanced chemical vapour deposition (ECR-PECVD). The influence of annealing conditions on the structural and luminescence properties was thoroughly studied. The optical properties of the films were investigated by performing variable angle spectroscopic ellipsometry (VASE) and photoluminescence (PL) measurements. The Eu-related emission was found to be highly dependent on the deposition parameters and annealing conditions. Eu2+ and Eu3+ emissions, which are attributed to blue and red light emissions, respectively, were observed. The structural properties were investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM) analyses, and the formation of nanoclusters was confirmed. At annealing temperatures of 900 °C and beyond, EuxSiyOz crystals were formed, and Eu ions were optically activated. As the light emissions of these thin films are in the blue and red wavelength range, they are promising candidates to be used as greenhouse covers and transparent solar cells.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".