Fabrication and characterization of zone plates for EUV applications
Bibliographic record
Abstract
There is demand for optics for EUV applications including microscopy and diagnostic devices for EUV lithography exposure masks. Au and W are common materials for such applications, but they have relatively low theoretical diffraction efficiency. Ru is a good candidate for 13.5 nm wavelength applications as it has greater theoretical efficiency than Au or W. It also has the benefit of oxidizing less during plasma etching or on exposure to air. Oxidation can be a concern for materials with higher theoretical zone plate efficiency such as molybdenum because it can lead to a significant decrease in theoretical efficiency. Additionally, molybdenum also presents more etching challenges than Ru, particularly concerning sidewall verticality. Our work involves the fabrication and characterization of diffraction gratings and zone plates for 13.5 nm EUV applications. The fabrication of W and Ru phase zone plates with 80 nm outer zone width through electron beam lithography and plasma etching is presented. Characterization of the zone plate through SEM and STEM imaging, as well as EDX analysis, was performed. A comparison between the W and Ru zone plates is given.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".