Deposition of TiC Film by Microwave Sheath-Voltage Combination Plasma
Bibliographic record
Abstract
To improve wear resistance and adhesion, a hard film of titanium carbide (TiC) is usually prepared by a plasma chemical vapor deposition technique. Microwave sheath-voltage combination plasma (MVP) is a method to generate high-density plasma. In the present study, TiC coatings were prepared by MVP and the processing conditions were examined to reveal the effect on film deposition speed. The TiC coatings were deposited in a reactor using a TiCl4-CH4-H2-Ar gas mixture. The phase identifications, binding energy analysis, coating composition, and friction coefficient were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), energy dispersive X-ray spectroscopy (EDX), and ball-on-disk friction tester, respectively. TiC was detected by XRD. As the flow rate of the raw material gas increased, the film deposition rate increased. The maximum deposition rate of the films was 9.0 µm/h. By changing the film deposition conditions, it is considered that higher speed film deposition of TiC will be possible.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.002 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".