Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask
Why this work is in the frame
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Bibliographic record
Abstract
In view of the wide range of applications for ultra-sharp silicon (Si) nanocones, extensive research has been conducted on their fabrication processes. However, these conventional methods pose challenges in terms of achieving uniformity, controllability, and cost-efficiency. This study presents a novel approach to fabricating Si nanocone structures through reactive ion etching (RIE) using a tapered silicon dioxide mask, followed by thermal oxidation sharpening to reduce the apex diameter to 4 nm. Here the tapered SiO2 mask with a smooth sidewall was created through a combination of RIE and a buffered oxide etchant (BOE) etching. The lithography of the oxide mask is achieved using a cost-effective (compared to electron beam lithography) maskless aligner system (MLA). Subsequently, a non-switching pseudo-Bosch process, employing sulfur hexafluoride (SF6) gas and octafluorocyclobutane (C4F8) gas, is utilized for the etching the Si nanocone structures, resulting in an average apex diameter of 30 nm. Finally, thermal oxidation followed by oxide removal further sharpens these cones to 4 nm.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it