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Record W4401421799 · doi:10.1039/d4nr02610a

Abrasive-free chemical-mechanical planarization (CMP) of gold for thin film nano-patterning

2024· article· en· W4401421799 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueNanoscale · 2024
Typearticle
Languageen
FieldEngineering
TopicAdvanced Surface Polishing Techniques
Canadian institutionsInstitut National de la Recherche ScientifiqueUniversity of WaterlooInstitut interdisciplinaire d'innovation technologiqueUniversité de Sherbrooke
FundersÉcole Centrale de LyonInstitut National des Sciences Appliquées de LyonFonds de recherche du Québec – Nature et technologiesUniversité Grenoble AlpesNatural Sciences and Engineering Research Council of CanadaCMC MicrosystemsUniversité de SherbrookeCentre National de la Recherche ScientifiqueIndian National Science Academy
KeywordsChemical-mechanical planarizationAbrasiveMaterials scienceNano-NanotechnologyThin filmComposite materialMetallurgyLayer (electronics)

Abstract

fetched live from OpenAlex

were fabricated and the planarization dynamics were monitored over time, leading to the identification of distinct planarization phases and their correlation with the material removal mechanism. Finally, plasmonic cavities of gold nanostructure arrays over a gold mirror were fabricated. The cavities exhibited efficient plasmonic resonance in the visible range, aligning well with simulation results.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.806
Threshold uncertainty score0.627

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.247
Teacher spread0.236 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it