On Electromagnetic Variable Air-Gap Reluctance Actuator Motion System: Characterization, Modeling, and Feedforward Control
Bibliographic record
Abstract
Reluctance actuators are being explored as a promising alternative to Lorentz actuators for driving advanced precision motion systems like lithography machine wafer scanners, primarily due to their capacity to generate higher magnetic force. However, the inherent force-to-current and force-to-gap nonlinearities pose significant challenges in designing their control systems. Also, negative stiffness in reluctance actuators can lead to instability and control complexities. Over the past decade, numerous studies have contributed to the modeling, design, and control of reluctance actuators. This article introduces designs for both C-core reluctance actuator (C-CRA) and E-core reluctance actuator (E-CRA), deriving analytical models for magnetic force and stiffness tailored for high-precision motion applications. Simulation and experimental findings are juxtaposed to elucidate and assess the proposed designs. The outcomes reveal that the C-CRA exhibits lower stiffness magnitudes at smaller air gap distances (below 0.5 mm) than the E-core variant. Furthermore, it demonstrates reduced force errors between measured and analytically modeled forces. Consequently, the C-CRA is recommended for short-stroke applications within high-precision motion systems. The study also investigates the force-to-gap relationship across different input currents. It presents frequency responses for systems with and without a feedforward controller, offering insights into the stiffness of the reluctance actuator.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".