(Dielectric Science & Technology Thomas Callinan Award) Rare-Earth Luminescence in Silicon-Based Thin Film Structures
Bibliographic record
Abstract
For Si-based materials to be used in solid-state lighting and silicon photonics schemes it is necessary to have precise control of the optical emission from these materials. This can be accomplished using rare earth dopants such as Ce, Tb, and Eu to obtain blue, green, and red emissions, respectively. In this talk, we first will provide a review of our work in this field and then focus on Eu-doped films, which are particularly attractive for silicon photonic applications due to their intense emission in the visible spectral region [1]. We will also discuss the benefits of introducing a novel hybrid radio frequency (RF) magnetron sputtering source in the electron cyclotron resonance (ECR) plasma enhanced chemical vapour deposition (PECVD) reactor chamber [2], using the example of Tb-doped SiON films [3]. This approach contrasts with traditional doping methods which use metal-organic precursors or ion implantation to introduce rare-earth dopant species into the host matrix. [1] F. Azmi et al., “Tunable Emission from Eu:SiO x N y Thin Films Prepared by Integrated Magnetron Sputtering and Plasma Enhanced Chemical Vapor Deposition”, J. Vac. Sci. Technol. A 40, 043402 (2022); DOI: 10.1116/6.0001761 [2] J.W. Miller et al., “Integrated ECR-PECVD and Magnetron Sputtering System for Rare-Earth-Doped Si-Based Materials”, Surface and Coatings Technology 336, 99 (2018); DOI: 10.1016/j.surfcoat.2017.08.051 [3] Z. Khatami et al., "A comprehensive calibration of integrated magnetron sputtering and plasma enhanced chemical vapor deposition for rare-earth doped thin films", J. Mater. Res. (2023); DOI: 10.1557/s43578-023-01207-2
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.002 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.003 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.001 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".