Influence of Substrate Patterns on the Coating Microstructure in Aerosol-Deposited Alumina Coatings
Bibliographic record
Abstract
Abstract Aerosol deposition (AD) is a novel method for producing dense nanocrystalline ceramic films at room temperature. Previous studies primarily used flat substrates with varying hardness and roughness. However, the development of micro-device applications is increasing the demand for deposition on structured/patterned surfaces. To investigate the impact of substrate patterns on coating microstructure and growth mechanisms in AD, alumina coatings were deposited on patterned Si substrates. Si wafers with patterns of micropillars were employed. The coatings were characterized using laser scanning microscopy, scanning electron microscopy, and x-ray diffraction. The microstructure and density of coatings in the valleys were influenced by the size of and the spacing between the patterns. The results revealed that coatings initially formed in the valleys before covering the entire pattern. Fragments of the initial powder particles became trapped between the patterns, adhering to the groove bottoms and pillar sides. Subsequent particle impacts and densification processes transformed these fragments, ultimately filling the gaps between the walls. With further deposition, a uniform coating surface was achieved.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".