Generation of GHz surface acoustic waves in (Sc,Al)N thin films grown on free-standing polycrystalline diamond wafers by plasma-assisted molecular beam epitaxy
Bibliographic record
Abstract
Abstract Telecommunication of the next generation demands filters that can operate in the 10 GHz range with sufficient bandwidths. For surface-acoustic-wave (SAW) devices this prerequisite translates into high sound velocities and high piezoelectric couplings. Wurtzite AlN on diamond, which exploits the strong piezoelectricity of AlN with the very high SAW velocity of diamond, has been considered a promising platform. A significant boost (up to a factor of 4) of the piezoelectric response can be obtained by alloying AlN with Sc. Here, the main challenge lies in the synthesis of highly-oriented thin (Sc,Al)N films on diamond. In this work, we aim at establishing a platform for SAW devices using plasma-assisted molecular beam epitaxy for the deposition of Sc 0.2 Al 0.8 N on diamond. We investigate the structural properties related to SAW generation gearing towards applications at high frequencies. To this end, we prepare (Sc,Al)N thin films on polished polycrystalline diamond wafers and demonstrate the efficient generation of SAW modes with frequencies up to 8 GHz. Systematic studies of the dependence of the SAW velocity and electromechanical coupling coefficient on the Sc 0.2 Al 0.8 N film thickness is presented for various SAW modes. Our result demonstrates the potential of this material combination for future application that requires large bandwidth in the ultra-high frequency range.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".