Electronic Passivation of Crystalline Silicon Surfaces Using Spatial‐Atomic‐Layer‐Deposited HfO<sub>2</sub> Films and HfO<sub>2</sub>/SiN<sub><i>x</i></sub> Stacks
Bibliographic record
Abstract
Spatial atomic layer deposition (SALD) is applied to the electronic passivation of moderately doped (≈10 16 cm −3 ) p‐type crystalline silicon surfaces by thin layers of hafnium oxide (HfO 2 ). For 10 nm thick HfO 2 layers annealed at 400 °C, an effective surface recombination velocity S eff of 4 cm s −1 is achieved, which is below what has been reported before on moderately doped p‐type silicon. The one‐sun implied open‐circuit voltage amounts to iV oc = 727 mV. After firing at 700 °C peak temperature in a conveyor‐belt furnace, as applied in the production of solar cells, still a good level of surface passivation with an S eff of 21 cm s −1 is attained. Reducing the HfO 2 thickness to 1 nm, the passivation virtually vanishes after firing (i.e., S eff > 1000 cm s −1 ). However, by adding a capping layer of plasma‐enhanced‐chemical‐vapor‐deposited hydrogen‐rich silicon nitride (SiN x ) onto the 1 nm HfO 2 , a substantially improved firing stability is attained, as demonstrated by S eff values as low as 30 cm s −1 after firing, which is attributed to the hydrogenation of interface states. The presented study demonstrates that SALD‐deposited HfO 2 layers and HfO 2 /SiN x stacks have the potential to evolve into an attractive surface passivation scheme for future solar cells.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".