Effect of Middle Membrane Dimensions on Dynamic Control Range in Dual Membrane Capacitive Micromachined Ultrasonic Transducers
Bibliographic record
Abstract
Two sets of multiple moving membrane capacitive micromachined ultrasonic transducers (M3-CMUTs) are designed and fabricated for a range of middle membrane radii, from 35 – <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$49~\mu $ </tex-math></inline-formula>m and 34 – <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$44~\mu $ </tex-math></inline-formula>m. All other design parameters were kept identical within each set of experiments to enable a fair comparison. To study the dynamic control range of the designed M3-CMUTs, their performance was first evaluated through COMSOL simulation yielding results on the resonant frequency and corresponding cavity height. This was followed by fabrication of the same designs using multiuser microelectromechanical systems processes (MUMPs). The development of these prototypes enabled the comprehensive electrical characterization of the designs with responses that are demonstrated to be in full agreement with the simulation results. The middle membrane radii of the M3-CMUTs impact the collapse voltage of these devices in addition to affecting the measured resonant frequencies when tested devices within the same measurement conditions. A 20 kHz increase in resonant frequency shift was recorded when the middle membrane radius of these devices was increased from <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$7~\mu $ </tex-math></inline-formula>m to <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$10~\mu $ </tex-math></inline-formula>m while operating under a 20V top membrane bias and −3V to −5V middle membrane bias. These observations indicate that the middle membrane radius has influence on the dynamic control of effective cavity height in M3-CMUTs, which enables the expansion of the devices’ cavity heights beyond that of conventional capacitive micromachined transducers. This finding has potential in applications with a need for acoustic power where dynamic control of the cavity height could serve as a solution, such as in medical imaging.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".