Spatial Atomic Layer Deposition for Energy and Electronic Devices
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
Functional thin films play a critical role in efforts toward efficient devices for energy conversion and storage, as well as low-loss electronics. These films need to be manufactured at scale, cost-effectively, and with precision. Atmospheric pressure spatial atomic layer deposition (AP-SALD) has emerged as a promising technique for fulfilling these requirements. AP-SALD replicates the subnanometer control of thickness, uniformity, crystallinity, and conformality to the substrate featured in conventional atomic-layer-deposited films, but has the important advantage of depositing these films with growth rates that are orders of magnitude higher. This review discusses the opportunities and advantages that AP-SALD opens up in energy-conversion and storage devices, as well as low-loss electronics. In particular, the review features recent work on using AP-SALD-grown films for photovoltaics, light-emitting diodes, self-powered sensors, and photoelectrochemical cells and batteries, as well as in transparent conductive materials and the epitaxial growth of thin films. Perspectives on future unexplored opportunities for AP-SALD in energy and low-loss electronics are also discussed.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it