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Record W4408099603 · doi:10.1063/5.0250408

Crack-free ScxAl1−xN(0001) layers grown on Si(111) by plasma-assisted molecular beam epitaxy

2025· article· en· W4408099603 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueAPL Materials · 2025
Typearticle
Languageen
FieldEngineering
TopicAcoustic Wave Resonator Technologies
Canadian institutionsHuawei Technologies (Canada)
Fundersnot available
KeywordsMolecular beam epitaxyMaterials sciencePlasmaEpitaxySiliconOptoelectronicsComposite materialLayer (electronics)

Abstract

fetched live from OpenAlex

We investigate the synthesis of 340-nm-thick ScxAl1−xN layers with 0 ≤ x ≤ 0.35 on AlN-buffered Si(111) by plasma-assisted molecular beam epitaxy. We employ an AlN nucleation layer under conditions giving rise to single-domain N-polar [(0001̄)-oriented] layers, as demonstrated by the (3 × 3) pattern observed in reflection high-energy electron diffraction and confirmed by KOH etching. The subsequent growth of pure wurtzite ScxAl1−xN layers with x ≤ 0.1 is feasible at temperatures ≤740 °C. However, layers with x ≥ 0.2 grown at 740 °C develop cracks due the high thermal mismatch between ScxAl1−xN and Si. Lowering the growth temperature to 500 °C not only prevents cracking but also improves the crystallinity of the layers. For Sc0.3Al0.7N layers grown at 500 °C, additional x-ray reflections due to intermetallic AlSc and Al3Sc inclusions are observed. The formation of these compounds can be inhibited by lowering the temperature further to 300 °C.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.053
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.005
GPT teacher head0.208
Teacher spread0.202 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it