Investigation of Source/Drain Height Variation and Its Impacts on FinFET and GAA Nanosheet FET
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Bibliographic record
Abstract
As semiconductor technology and process nodes advance, three-dimensional devices like FinFET and NSFET are increasingly becoming the primary choice, replacing planar MOSFETs. However, the complex manufacturing processes and high process sensitivity of three-dimensional devices at advanced process nodes inevitably cause significant deviations from the ideal structure during actual fabrication, leading to notable changes in their electrical characteristics. This paper investigates the impact of source/drain region height fluctuations caused by etching and epitaxial growth variations on the electrical characteristics of FinFET and NSFET devices, as well as their related circuits. The electrical characteristics when height variations occur in single and multiple electrodes indicate that, although NSFET and FinFET generally exhibit similar properties such as a decrease in the ON-state current when the source/drain height is reduced, the independent nature of the nanosheets in NSFET and the unidirectional conduction of Schottky contact resistance cause significant differences in their electrical characteristics. Additionally, the related circuit-level simulations show that height fluctuations in the source/drain regions of devices can significantly impact circuit characteristics, including voltage and delay, and in severe cases, they may even lead to circuit failure.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it