Effect of HF Wave Frequency on N-atom Production in N2 HF Plasmas and Its Application in CN Thin Films Deposition
Bibliographic record
Abstract
Microwave plasmas are produced in many chapters by launchers named Surfatron at 2450 MHz to form so-called Surface Wave (SW) plasmas. Another plasma RF (13.56 MHz) structure was compared to Surfatron launchers with application to TiO2 nitriding. Variations of N atom density have been measured by emission spectroscopy, calibrated using NO titration, in the N2 late and pink flowing afterglows as a function of the wave frequency f used to generate Surface Wave (SW) plasma. It is found that [N] increases with the absorbed power PA but saturates above a threshold power which decreases with f. At 2450 MHz and a constant pressure of 4 Torr, [N] reaches 1.5 x 1015 cm -3 in the saturation regime while a saturated value of only 7 x10 14 cm -3 is attained at 13.56 MHz. The density variations of [N] as a function of f and PA correlate in the increasing region with that of the vibrational temperature as a result of electron collisions and in the saturated region with the gas temperature when it exceeds 500-600 K. Finally, [N] increases with pressure from 2 to 8 Torr (at constant PA of 100 W) and decreases with the tube diameter (6 to 15 mm), at constant pressure of 4 Torr. These results show that the highest N-atom density is obtained at 2450 MHz. A source of N-atoms produced by such N2 afterglows was combined with laser ablation of graphite for CNX thin film deposition. The XPS and IR analysis of the films have shown that the presence of nitrogen atoms in the post-discharge enhances the incorporation of N into the CNx layers. The N incorporation increases as pressure is increased through the formation of hydrogenated carbon nitride groups while at low pressure of about 10-3Torr, unhydrogenated sp2 and sp3 CN bonds are produced in amorphous forms. The study concluded that the highest [N] value was obtained at 2450 MHz and that the power efficiency was also the highest at this same frequency.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".