Sol-gel dip-coating of yttrium oxide films with eco-friendly additives for enhanced plasma-resistant coatings
Bibliographic record
Abstract
Abstract Yttrium oxide (Y 2 O 3 ) is a promising material for plasma-resistant coatings, commonly used to protect ceramic equipment in chambers for applications such as semiconductor manufacturing. This study examines the effects of five additives on Y 2 O 3 film formation via sol-gel dip-coating and evaluates their quality and plasma resistance. Lauryl dimethylaminoacetic acid (LDAAA) and Carboxymethyl cellulose sodium salt (CMC) additives were dense, pinhole-free, and exhibited plasma resistance comparable to those prepared with 2-methoxyethoxyethanol (2-MEE), a flammable substance with teratogenic toxicity. In contrast, LDAAA and CMC are safer alternatives, widely used as surfactants and thickeners in commercial products. Plasma resistance tests showed a 20-fold improvement over untreated quartz glass, highlighting their practical potential. This study demonstrates a strategy for producing high-quality, plasma-resistant Y 2 O 3 films using safer and more efficient additives.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".