CONDUCTIVE DIRECT BONDING OF IN-SITU DOPED POLYSILICON FOR MEMS WAFER-LEVEL PACKAGING
Bibliographic record
Abstract
This paper presents the demonstration of conductive hydrophobic direct bonding between two In-Situ Doped Polysilicon (ISDP) films for MEMS wafer-level packaging.A key enabling factor for this direct bonding was the surface roughness reduction down to 0.22 nm RMS achieved using Chemical Mechanical Polishing (CMP) process, surpassing the minimal requirement.To evaluate the electrical characteristics of the bonded interface, daisy chain structures were realized, revealing low electrical resistance suitable for MEMS resonator applications.The average contact resistivity of 8 km 2 , demonstrates superior electrical performances compared to other reported silicon/silicon interfaces.This opens the possibility of using polysilicon in bonded and conductive wafer-level packaging.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".