Tailoring CuO <sub>x</sub> Films via Open‐Air Spatial Atomic Layer Deposition and Their Application in Room‐Temperature Humidity Sensing
Bibliographic record
Abstract
Abstract This study demonstrates the tunability of copper oxide (CuO x ) thin films synthesized using open‐air atmospheric‐pressure spatial atomic layer deposition (AP‐SALD). By systematically varying the deposition temperature and copper precursor flow rate, as well as introducing nitrogen doping through in situ oxidant switching (from H 2 O to ammonium hydroxide (NH 4 OH)), the crystallinity, oxidation state, chemical composition, carrier concentration, and resistivity of CuO x films are modulated. Under optimized conditions, CuO x films achieve a very low resistivity of 0.178 Ω·cm and a high carrier concentration of 10 19 cm − 3 —among the best reported for AP‐SALD‐deposited CuO x . As proof of properties tailoring, these films are integrated into interdigitated‐electrode devices and evaluated as chemiresistive humidity sensors at room temperature. While CuO x films cannot typically sense humidity at room temperature, a film deposited at 225 °C and 350 sccm Cu flow exhibits a limit of detection of 99 ppm and a sensitivity of 0.244 Ω ppm −1 . This work establishes AP‐SALD as a powerful tool for tuning CuO x film properties via controlled deposition conditions and in situ doping—enabling application‐specific optimization for future optoelectronic or sensing platforms.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".