Aerosol assisted plasma for the deposition of multifunctional DLC: From the process to the mechanical properties
Bibliographic record
Abstract
Diamond like carbon (DLC) coatings were successfully deposited by aerosol-assisted plasma-enhanced chemical vapor deposition. This approach enables the use of non-volatile, reactive and/or solutions of precursors, offering a flexible route for complex film deposition. Here, liquid droplets of pentane within argon were injected in a RF capacitively coupled plasma. The influences of the injected power and of the aerosol injection rate on the deposition rate, structural characteristics, and mechanical properties were investigated. With a relatively high deposition rate, up to 110 nm·min −1 , the balance of matter of this process is very favourable with up to 450 nm deposited per cm 3 of pentane injected. Raman and FTIR spectroscopy revealed a progressive increase in sp 3 content and carbon network crosslinking, associated with a transition toward denser and more disordered structures. Mechanical testing confirmed a strong dependence on process parameters: at low self-bias, films were soft, brittle, and poorly adhered; at higher self-bias voltage (> 360 V), coatings exhibited excellent adhesion (HF1–2), no delamination under scratch testing (Lc₃ > 50 N), and hardness >20 GPa. These results demonstrate that aerosol assisted PECVD is a promising method for producing high-performance DLC coatings with tunable properties and high deposition efficiency.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".