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Record W4414827659 · doi:10.1016/j.pes.2025.100154

Advances in etching of 2D nanomaterials: Research challenges and advanced devices

2025· article· en· W4414827659 on OpenAlex
Imran Chowdhury, Md Younus Ali, Matiar M. R. Howlader

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueProgress in Engineering Science · 2025
Typearticle
Languageen
FieldMaterials Science
Topic2D Materials and Applications
Canadian institutionsMcMaster University
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsEtching (microfabrication)Process (computing)Troubleshooting

Abstract

fetched live from OpenAlex

Etching is central to the processing of two-dimensional (2D) materials, providing atomic-level precision needed to tailor their structural, electronic, and optical properties. Despite advances in plasma, chemical, and atomic layer etching, major challenges remain in achieving reliable depth control, defect management, and anisotropy at scales compatible with industrial manufacturing. The intrinsic sensitivity of 2D materials to processing conditions, coupled with substrate interactions, often limits reproducibility and device performance. Future progress will depend on methods that unite throughput with atomic precision, including resist-free and direct-write approaches that bypass conventional lithography, selective chemistries for multi-material heterostructures, and artificial intelligence–driven process control for real-time optimization. Advances in substrate engineering and interfacial selectivity will also be pivotal for wafer-scale integration. By defining key barriers and highlighting emerging opportunities, this review identifies the strategies most likely to transform 2D etching into a scalable platform for electronics, photonics, quantum technologies, and energy devices.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.002
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.074
Threshold uncertainty score0.344

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0020.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.027
GPT teacher head0.367
Teacher spread0.339 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it