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Record W4415371877 · doi:10.1038/s41378-025-00986-4

Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging

2025· article· en· W4415371877 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueMicrosystems & Nanoengineering · 2025
Typearticle
Languageen
FieldPhysics and Astronomy
TopicForce Microscopy Techniques and Applications
Canadian institutionsUniversity of Waterloo
FundersOntario Ministry of Research and InnovationIndustry Canada
KeywordsFabricationMicroscale chemistryNanoscopic scaleAtomic force microscopySiliconCharacterization (materials science)Etching (microfabrication)MicroscopeLimiting

Abstract

fetched live from OpenAlex

Atomic force microscope (AFM) systems rely on silicon (Si) probes for precise nanoscale characterization across diverse environments. However, fabricating high-aspect-ratio (HAR) and sharp Si tips and optimizing the handle geometries remain significant challenges. Conventional HAR probe fabrication methods lack scalability, precision, and cost efficiency, while cuboid-shaped handles risk obstructing laser detection and limiting compatibility. This study presents an innovative batch-fabrication strategy for high-performance Si AFM probes that integrate ultra-sharp HAR tips, rectangular cantilevers, and universally compatible stair-shaped handles. Notably, the tip fabrication process employs only low-cost microscale ultraviolet (UV) lithography, while still achieving nanoscale structural resolution. The fabricated probes exhibit a tip apex radius of 5 nm and a half-cone angle of 7.5°, enabling high-resolution and high-fidelity imaging. The novel stair-shaped handle geometry is introduced and fabricated via a single-step dry etching process, which provides unobstructed laser detection and ensures compatibility with a broad range of commercial AFM platforms. Durability testing demonstrates stable scanning performance for up to 8 hours within the 100 nm precision range, confirming the mechanical reliability of the design. This scalable, reproducible, and high-yield fabrication strategy represents a significant advancement in HAR AFM probe development, providing enhanced performance and extended applicability for diverse nanoscale imaging applications.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.592
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.003
GPT teacher head0.233
Teacher spread0.229 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it