Discovery of Solubilizers to Enhance the Swelling Kinetics of Epoxy SU-8 via Virtual Screening
Bibliographic record
Abstract
The slow swelling kinetics of SU-8 epoxy resist hinders its removal in semiconductor fabrication processes. To accelerate solubilizer discovery for swelling, we developed a virtual screening framework integrating molecular dynamics (MD) and machine learning. Using the diffusion coefficient within SU-8 as a key descriptor for solubilizer efficacy, we generated an MD-derived data set to train a graph convolutional neural network (GCN), enabling diffusivity predictions across >20 million compounds. This pipeline identified 4,6-decadienal (4,6-DDA) as a promising candidate. Experimentally, a 10 wt % aqueous solution of 4,6-DDA achieved 80.16% SU-8 swelling within 60 min, which was 3-fold greater than that of propylene carbonate. Simulations confirmed rapid 4,6-DDA penetration and enhanced performance in water, which is consistent with experimental measurements. This work demonstrates a rational simulation-guided strategy for the discovery of functional molecules for industrial processes.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".