MétaCan
Menu
Back to cohort
Record W4416670597 · doi:10.1021/acsaelm.5c01992

Defects in Plasma-Activated Amorphous SiO <sub>2</sub> Probed Using Positron Annihilation Spectroscopy

2025· article· en· W4416670597 on OpenAlex
Akira Uedono, Ryu Hasunuma, Hayato Kitagawa, Yuki Yoshihara, Fumihiro Inoue, Kentaro Mihara, Shimpei Aoki, T. M. Hare, Kiyoharu Mori, M. Murugesan, Takafumi Fukushima

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueACS Applied Electronic Materials · 2025
Typearticle
Languageen
FieldEngineering
TopicMuon and positron interactions and applications
Canadian institutionsHatch (Canada)
FundersJapan Science and Technology AgencyNew Energy and Industrial Technology Development Organization
KeywordsDoppler broadeningAmorphous solidAnnealing (glass)Positron annihilation spectroscopyTrappingPositronChemical vapor depositionSpectral lineAnalytical Chemistry (journal)Annihilation radiation

Abstract

fetched live from OpenAlex

Defects introduced by plasma activation in amorphous SiO 2 were probed by a monoenergetic positron beam. Doppler broadening spectra of the annihilation radiation were measured as a function of the incident positron energy for SiO 2 deposited from tetraethylorthosilicate using plasma-enhanced chemical vapor deposition on Si substrates. After N 2 plasma activation, electron (and/or positron) trapping centers were primarily introduced in the subsurface region (≤6 nm). The defect concentration decreased after postplasma processes: deionized water rinsing and additional H 2 O plasma activation, which was associated with the formation of silanol groups at the surface. However, a certain number of defects existed in the subsurface region, and they were not annealed out at the typical annealing temperature for bonding SiO 2 layers (400 °C). Because these defects can cause softening of the top surface region and attract water trapped between two wafers or in SiO 2, they are considered to contribute to the wafer-bonding process.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.018
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.005
GPT teacher head0.228
Teacher spread0.223 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it