Fabrication of 3D Microrobotic Parallel Actuator Architecture
Bibliographic record
Abstract
ABSTRACT In this paper, we report on the micro/nanofabrication of a 2×1 microrobotic parallel actuator architecture for applications in biomanipulation and genetic therapy. The architecture has arrays of independently actuated micro-nano-needles with 3D mobility. This device is capable of precise micro-nano manipulation tasks, such as targeted drug delivery into single cells in vitro and aspiration critical for biomanipulation on a parallel high throughput scale. The four-sided single-unit actuator ( 4SA ) microrobot has been jointly fabricated at the University of Canterbury’s ( UC ) Nanofabrication Facility and the Canadian Microelectronics Corporation ( CMC ). The three-sided single-unit actuator ( 3SA ) microrobot is being fabricated by CMC in collaboration with Micralyne Inc. The 4SA microrobot is fabricated using a combination of silicon-on-insulator multi-user MEMS process ( SOIMUMPs ) and bonding with another silicon wafer containing a long-standing tower for parallel-plate actuation. It involves a combination of photolithography, dry etching ( RIE ), oxidation, KOH wet etching, bonding and the micro-nanoneedle tip being fabricated using focused ion beam technology. The 3SA microrobot is fabricated using MicraGEM-Si technology, developed by Micralyne Inc. in Canada. This process uses two SOI wafers with the bottom electrode being etched on the base wafer and the suspended actuator structures on the top device wafer. The two wafers are electrically connected through the bond interface, resulting in 3D routing of electrical signals. We report details of the singular and parallel architecture fabrication, working principle in brief, significant results from the SiO 2 etch study of the formation of Si nanopillars and briefly discuss the experimental results from the characterization of the 4SA microrobot.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".