Fabrication of 2d And 3d Inductors for Dc-Dc Converters Integrated On Glass Interposer
Bibliographic record
Abstract
ABSTRACT Inductors are a key component for voltage regulators and its on-chip integration could significantly improve their performance and scalability capabilities. However, innovative microfabrication processes have yet to be developed in order to miniaturise the inductors while maintaining their overall performance. In that regards, thinfilm magnetic materials on glass substrates, which amplifies inductance values, should ease on-chip inductor integration. Using Ni 45 Fe 55 and Co 80 P 20 magnetic materials, we successfully fabricated 2D core and coreless copper inductors, on both glass and silicon substrates for comparison purposes. Inductors on glass exhibit better performance than the ones fabricated on silicon. An inductance of 10.3 nH (14.7 nH/mm 2 ) at 100 MHz and a quality factor of 5 were reached. We also propose a process flow and morphological characterizations of a 3D inductor architecture on glass substrate featuring through glass vias.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".