Growing silicon thin–films laterally over amorphous substrates using the vapor–liquid–solid technique
Bibliographic record
Abstract
A new technique for growing two-dimensional, laterally grown silicon crystals has been developed.This research borrows from previously reported crystal growing techniques such as Bridgman-Stockbarger growth, epitaxial layer overgrowth, and the vapor-liquid-solid method.Reviews of these technologies are presented.To achieve laterally growth of silicon films, a variant of the vapor-liquid-solid method was utilized, along with equipment and materials traditionally used for microelectronics, to fabricate test structures know as micro-crucibles.These test structures are templates of amorphous materials which confine gold catalyst to a specified geometry.Upon the introduction of a reactive, silicon-containing gas, which diffuses into the micro-crucible and preferentially cracks at the confined gold catalyst, the vaporliquid-solid process takes place and two-dimensional silicon crystals are nucleated from supersaturated gold-silicon alloys within the confines of the micro-crucible.The experimental techniques used to fabricate the micro-crucibles and analyze the silicon growth are described, and new theories on the mechanics of vapor-liquidsolid growth within the micro-crucible test structures are discussed.Semiconducting films grown laterally from micro-crucibles are potential enablers of photovoltaic, optical interconnect, three-dimensional transistor and silicon/III-V on-chip integration technologies, and micro-crucibles are as useful research tools for fundamental studies on grain boundary and solidification theory.v ABR G Une nouvelle technique pour faire crotre des cristaux deux-dimensionnels de silicone, crs latralement, a t dveloppe.Cette recherche prte des techniques rapportes antrieurement, tel que la croissance Bridgman-Stockbarger, la surcroissance pitaxiale par couches et la mthode vapeur-liquide-solide.Ces techniques sont rvises et discutes en dtails.Pour obtenir des pellicules de silicone crues latralement, une variation de la mthode vapeur-liquide-solide a t utilise avec de l'quipement et des matriaux utiliss surtout dans des microlectroniques.Des structures tests, appeles des micro-creusets, ont donc t fabriques.Ces structures tests sont des modles de matriaux amorphes qui confinent un catalyseur d'or une gomtrie spcifique.Pendant l'introduction d'un gaz contenant de la silicone ractif, qui diffuse dans le micro-creuset et fend prfrentiellement au catalyseur d'or confin, le procd vapeur-liquide-solide prend place et il y a une nuclation des cristaux de silicone deux-dimensionnels surgissant des alliages sursaturs d'or et de silicone dans les confines du micro-creuset.Les techniques exprimentales utilises pour fabriquer les micro-creusets et pour analyser la croissance du silicone sont dcrites, et de nouvelles thories sur les mcanismes de la croissance vapeur-liquidesolide dans les micro-creusets sont discutes.Les pellicules semi-conductrices crues latralement sont des facilitatrices potentielles de photovoltaiques, d'interconnexions optiques, de transistors trois-dimensionnels et de technologies intgratrices de puces silicone/III-V.Les micro-creusets sont aussi des outils de recherche utiles pour des tudes fondamentales sur les fonds de grains et la thorie de solidification.vi
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.001 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.004 | 0.000 |
| Scholarly communication | 0.001 | 0.002 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.002 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".