Three-degrees-of-freedom MEMS Electrostatic Out-of-plane Comb-drive Actuator for Auto-focus and Image Stabilization in Phone Cameras
Bibliographic record
Abstract
Two versions of a novel three-degrees-of-freedom MEMS electrostatic vertical comb-drive actuator were developed, fabricated, and demonstrated. The novel actuator utilizes a flexure mechanism in which the in-plane (x-y) stiffness is high compared to the out-of-plane (z-axis) stiffness, allowing the actuator to achieve large stroke along the z-axis. The first actuator was able to achieve a large pure translation of 28 µm at 80 V without a stroke magnification mechanism, and also achieve an angle of rotation of 0.78º at 70 V. The second actuator was able to vertically displace a 3 mg mass for 13.5 µm at 80 V. Two enhanced designs of the 3-DOF actuator were also proposed and modelled and analyzed using CoventorWare. These actuators are developed specifically for Auto-Focus (AF) and Optical Image Stabilization (OIS) in phone cameras. Both designs meet the requirements of AF and OIS in phone cameras based on the numerical simulations results.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".