Stoichiometric Hydrogenated Amorphous Silicon Carbide Thin Film Synthesis Using DC-saddle Plasma Enhanced Chemical Vapour Deposition
Bibliographic record
Abstract
Abstract\nSilicon carbide is a versatile material amenable to variety of applications from electrical\ninsulation to surface passivation, diffusion-barrier in optoelectronic and high-frequency devices.\nThis research presents a fundamental study of a-SiC:H films with variable stoichiometries\ndeposited using novel technique, DC saddle-field plasma-enhanced chemical-vapour deposition,\na departure from conventional RF PECVD commonly used in industry. DCSF PECVD is an\nalternative technique for low temperature large area deposition. Stoichiometric a-SiC:H obtained\nby fine-tuning precursor gas mixture. Annealing up to 800oC showed no significant change in\nelemental composition; particularly indicating thermal stability at stoichiometry. Ellipsometry\nshowed wide range of optical gaps whose maximum surpasses values reported in literature.\nRefractive index measured and change in values studied as function of increasing carbon content\nin the films. Also attainment of very smooth surface morphology for stoichiometric a-SiC:H\nfilms reported. Surface roughness of 1 nm rms demonstrated for films grown at temperature as\nlow as 225oC.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".