Electronic Structure of Cerium Oxide Gate Dielectric Grown by Plasma-Enhanced Atomic Layer Deposition Woo-Hee Kim,a,b W. J. Maeng,c Min-Kyu Kim,a Julien Gatineau,d,*
Bibliographic record
Abstract
We have systematically investigated the electronic structure of CeO2 dielectric by plasma enhanced atomic layer deposition (PE-ALD). The CeO2 films were deposited by using novel tris(isopropyl-cyclopentadienyl)cerium [Ce(iPrCp)3] precursor and O2 plasma. The energy band gap (3.48 eV), Fermi level (4.71 eV), and band offsets of PE-ALD CeO2 were elaborately determined by combining spectroscopic ellipsometry and ultraviolet photoemission spectroscopy (UPS) techniques. In addition, based on the ex-perimental results of Fowler-Nordheim(F-N) tunneling and Poole-Frenkel(P-F) conduction for Al/PE-ALD CeO2/p-Si, the increased interfacial layer and reduced trapped oxide densities were found to be correlated to the increase in effective barrier height (0.89, 1.18 and 1.26 eV) and decrease in decreased trap energy levels (0.47, 0.26 and 0.18 eV) with increasing O2 annealing temperature (400, 600 and 800C), respectively. These discrepancies might be attributed to the thin film characteristics and oxygen vacancies in the CeO2 dielectrics, depending on the deposition techniques and post deposition annealing processes. VC 2011 The Electrochemical Society. [DOI: 10.1149/1.3625611] All rights reserved.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".