Dual phase high temperature Si3N4/Al(Ti)N films with tunable thermal conductivity
Bibliographic record
Abstract
Abstract Engineering amorphous dielectric films with tunable thermal conductivity is advantageous for the thermal management of semiconductor devices and thermal insulation of aerospace applications. Here, we demonstrate that incorporating dense dispersed amorphous Al(Ti)N (~1 nm or above) nanoparticles having phase volume fractions from 6 to 70 %, has a negligible effect on the intrinsic thermal conductivity of the amorphous Si 3 N 4 matrix (~2 W m −1 K −1 ), in which the wave-like ‘propagons’ in Allen-Feldmann theory are believed to be unsupressed and non-tuned. By contrast, incorporating (5–15 nm) crystalline TiN phases significantly increases the thermal conductivity (up to 15 W m −1 K −1 ). Critically, the micrometre-thick Si 3 N 4 /AlN and Si 3 N 4 /TiN amorphous matrix dual-phase nanocomposite coatings exhibit excellent thermal stability upon exposure to ambient air at 1000 °C for 50 h. These findings shed light on the phonon transport mechanism regarding the effects of the second phase and pave a design pathway for engineering amorphous coatings displaying unprecedented high thermal conductivity and excellent thermal stability.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.002 | 0.001 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".