Mechanical Mode Coupled Piezo-on-Silicon Bulk Acoustic Wave MEMS Resonators in Tank Configuration for Q-Enhancement
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Bibliographic record
Abstract
A low-cost, commercially fabricated thin-film piezoelectric-on-silicon (TPoS) MEMS resonator demonstrating high quality factor (<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$Q$</tex-math> </inline-formula>) and low motional resistance (<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$R_{m}$</tex-math> </inline-formula>) is presented. A mechanically coupled tank topology is employed, coupling a fully differential central TPoS resonator with multiple non-electroded single-crystal silicon (SCS) disks. Three variants of this topology have been designed and validated experimentally, exploiting extensional and in-plane shear modes. The button-like (BL) mode forms the central TPoS tank, to which four breathing (BR) or wineglass (WG) mode disks are appended, resulting in configurations denoted BL-4BR and BL-4WG, respectively. A third variant, BL-12WG, utilizes twelve appended wineglass disks. In moderate vacuum (90 mTorr), the BL-12WG configuration achieves an exceptionally high unloaded quality factor (<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$Q_{ul}$</tex-math> </inline-formula>) of 55,000 and an <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$R_{m}$</tex-math> </inline-formula> of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$347~\Omega $</tex-math> </inline-formula>, representing approximately an 11-fold increase in <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$Q_{ul}$</tex-math> </inline-formula> and a 2.4-fold reduction in <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$R_{m}$</tex-math> </inline-formula> compared to an uncoupled BL resonator. The WG mode, in particular, exhibits enhancement factors nearly proportional to the number of appended SCS disks. Key design considerations—including mechanical dynamics, mode selection, and simulated performance—are discussed. The BL-12WG resonator, with its superior performance, emerges as a strong candidate for low-phase-noise oscillators.[2025-0174]
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.002 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.002 | 0.001 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.002 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it