Mechanical Mode Coupled Piezo-on-Silicon Bulk Acoustic Wave MEMS Resonators in Tank Configuration for Q-Enhancement
Bibliographic record
Abstract
A low-cost, commercially fabricated thin-film piezoelectric-on-silicon (TPoS) MEMS resonator demonstrating high quality factor ($Q$) and low motional resistance ($R_{m}$) is presented. A mechanically coupled tank topology is employed, coupling a fully differential central TPoS resonator with multiple non-electroded single-crystal silicon (SCS) disks. Three variants of this topology have been designed and validated experimentally, exploiting extensional and in-plane shear modes. The button-like (BL) mode forms the central TPoS tank, to which four breathing (BR) or wineglass (WG) mode disks are appended, resulting in configurations denoted BL-4BR and BL-4WG, respectively. A third variant, BL-12WG, utilizes twelve appended wineglass disks. In moderate vacuum (90 mTorr), the BL-12WG configuration achieves an exceptionally high unloaded quality factor ($Q_{ul}$) of 55,000 and an$R_{m}$of$347~\Omega $, representing approximately an 11-fold increase in$Q_{ul}$and a 2.4-fold reduction in$R_{m}$compared to an uncoupled BL resonator. The WG mode, in particular, exhibits enhancement factors nearly proportional to the number of appended SCS disks. Key design considerations—including mechanical dynamics, mode selection, and simulated performance—are discussed. The BL-12WG resonator, with its superior performance, emerges as a strong candidate for low-phase-noise oscillators.[2025-0174]
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".