Employing Air Holes In An Electrostatic Force Driven MEMS DC Electric Field Sensor
Bibliographic record
Abstract
Electrostatic force driven types of Micro-ElectroMechanical Systems (MEMS) dc electric field sensors employ an ac biased membrane, in a dc field this vibration will be modulated and detected by using a lock-in amplifier. However, the sensitivity is limited by air damping and Q-factor when membrane vibrates at a high speed. This paper investigates incorporating air holes in the membrane to reduce the effects of air resistance, which will lead to less damping and an increased Q-factor to improve the sensitivity. Three sizes of sensors were studied, and each size of sensor has three varieties with different number of holes. The best performing sensor is the largest sensor with the most air holes. In a $163 \mathrm{kV} / \mathrm{m}$ dc electric field, this $5 \mathrm{~mm} \times 5 \mathrm{~mm}$ sensing membrane operating at the resonance frequency of 72 Hz, and achieved an output voltage of 7.73 V. It has the best defined peak and lowest half energy bandwidth of 7.5 Hz, corresponding to a Q-factor of 10. The linear spring constant was measured to be $5.9 \mathrm{~N} / \mathrm{m}$.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".