Reactively Sputtered Aluminum Oxynitride Deposited at Ambient Temperature: A Material Platform for Tunable Optical Applications
Bibliographic record
Abstract
The objective of this study is to assess the material system of Aluminum Oxynitride, deposited through a low-temperature reactively sputtered process, as a potential thin film material platform for tunable optical applications across a broad UV-NIR spectral region. A thorough design of experiment assessment of the compositional and optical properties of the thin films is carried out with respect to the deposition parameter space explored herein. The as-deposited films exhibit distinct relationships between the deposition parameters explored and the realized atomic compositions, extending from AlN on the one end to approaching the γ- and spinel- AlON. Moreover, the deposition parameters and compositions obtained correspond strongly to the calculated optical properties, which exhibit a maximum change in refractive index of Δn1550,720=0.4 and a Δn320=0.6. Supplemental electrical characterization was undertaken on samples deposited with and without oxygen, where improved ion interflow is observed in the oxygenated samples. The demonstrated experimental results suggest that the aluminum oxynitride material platform has the potential for broad-spectrum tunable photonic applications.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".