Growth of $\varepsilon-\left(\text{In}_{\mathrm{x}} \text{Ga}_{1-\mathrm{x}}\right)_{2} \mathrm{O}_{3}$ on AlN via Pulsed Laser Deposition
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Bibliographic record
Abstract
Ga<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> and its alloys are some of the most desirable ultra-wide bandgap semiconductors for high-power and harsh environment electronics, solar blind deep UV photodetectors, deep UV LEDs, toxic gas sensors, and highpower Schottky barrier diodes. In this research, hexagonal <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\varepsilon$</tex> (In0.15 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\left.\text{Ga}_{0.85}\right)_{2} \mathrm{O}_{3}$</tex> was successfully deposited on AIN for the very first time. The epitaxial <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">${\varepsilon}$</tex>-(In0.15Ga0.85)2O3 was deposited on wurtzite c-plane (0002) AIN via pulsed laser deposition (PLD), using optimized PLD growth parameters, including the temperature and the oxygen partial pressure. It was observed that a moderate substrate temperature of 550 °C and a relatively high PLD oxygen partial pressure of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1.25 \times 10^{-2} \text{Torr}$</tex>, a laser energy density of ∼1.38 Jcm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−2</sup>, and a laser repetition rate of 2 Hz were necessary to successfully grow <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">${\varepsilon}$</tex>-(In0.15Ga0.85)2O3. The attained bandgap was 4.53 eV. X-ray photoelectron spectroscopy (XPS) high-resolution depth profile confirmed the uniform presence of indium throughout the <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">${\varepsilon}$</tex>-(In0.15Ga0.85)2 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathbf{O}_{3}$</tex> thin films. With <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 2500$</tex> laser pulses, the attained thickness of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\varepsilon \left(\text{In}_{0.15} \text{Ga}_{0.85}\right)_{2} \mathrm{O}_{3}$</tex> was ∼ 80 nm, confirmed by ellipsometry.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.003 | 0.000 |
| Meta-epidemiology (narrow) | 0.002 | 0.002 |
| Meta-epidemiology (broad) | 0.003 | 0.001 |
| Bibliometrics | 0.002 | 0.002 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.001 | 0.002 |
| Open science | 0.002 | 0.001 |
| Research integrity | 0.002 | 0.001 |
| Insufficient payload (model declined to judge) | 0.015 | 0.003 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it