A method for the analysis of multiphase bonding structures in amorphous SiOxNy films
Bibliographic record
Abstract
A tetrahedral model is presented to explain the bonding properties of nonstoichiometric amorphous silicon oxynitride (a-SiOxNy) alloys, grown under highly nonequilibrium conditions, whose structures obey neither the random bonding model nor the random mixture model. Based on our approach, a numerical procedure is proposed to obtain the relative atomic percentages of each component structural phase from the deconvolution of the high-resolution x-ray photoelectron spectroscopy (XPS) spectra in the Si 2p3∕2 region. The tetrahedral model is then used to study the bonding properties of a-SiOxNy films grown by electron-cyclotron resonance plasma-enhanced chemical-vapor deposition, having relatively low values of the O/Si atomic ratio (⩽0.37) incorporated in their networks. The experimental results show that five tetrahedral phases (tetrahedrons Si–Si4, Si–Si2ON, Si–N4, Si–Si3O, and Si–O4) are present in a-SiOxNy films with low N/Si atomic ratios (⩽0.93), while only three phases (Si–SiON2, Si–N4, and Si–O2N2) are present in samples with higher N/Si atomic ratios (⩾1.12). The Si3N4 phase is the most important bonding unit and it is the only phase present in all our samples. These results are corroborated by survey scans and by comparison with the high-resolution XPS spectra in the N 1s region. They support the validity of the model proposed for a-SiOxNy alloys and the XPS analysis, correlated with growth conditions, presented in this work.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".